Invention Grant
- Patent Title: Energy filter for cold field emission electron beam apparatus
- Patent Title (中): 用于冷场发射电子束装置的能量滤波器
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Application No.: US12234453Application Date: 2008-09-19
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Publication No.: US07919749B2Publication Date: 2011-04-05
- Inventor: Fang Zhou , Juergen Frosien , Pavel Adamec
- Applicant: Fang Zhou , Juergen Frosien , Pavel Adamec
- Applicant Address: DE Heimstetten
- Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Current Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Current Assignee Address: DE Heimstetten
- Agency: Patterson & Sheridan, L.L.P.
- Priority: EP07020340 20071017
- Main IPC: H01J37/244
- IPC: H01J37/244
Abstract:
An electron beam apparatus and a method for providing an energy-filtered primary electron beam are described. Therein, a primary electron beam having an asymmetric first energy distribution is generated by means of an electron source. The primary electron beam is high-pass energy filtered using a retarding lens.
Public/Granted literature
- US20090101819A1 ENERGY FILTER FOR COLD FIELD EMISSION ELECTRON BEAM APPARATUS Public/Granted day:2009-04-23
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