Invention Grant
- Patent Title: Inspection apparatus and inspection method by using terahertz wave
- Patent Title (中): 使用太赫兹波检查仪器和检验方法
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Application No.: US12359225Application Date: 2009-01-23
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Publication No.: US07919752B2Publication Date: 2011-04-05
- Inventor: Takeaki Itsuji
- Applicant: Takeaki Itsuji
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2008-017844 20080129
- Main IPC: G01N21/35
- IPC: G01N21/35 ; G01N21/31

Abstract:
An inspection apparatus includes a terahertz wave detection portion, a waveform shaping portion configured to shape a first answer signal with respect to a terahertz wave by using a signal acquired in the above-described terahertz wave detection portion, a measurement condition acquisition portion configured to acquire a first measurement condition, an answer signal storage portion configured to store second answer signals corresponding to measurement conditions, a selection portion configured to select the above-described second answer signal from the above-described answer signal storage portion, and a signal processing portion configured to conduct deconvolution with respect to the above-described first answer signal on the basis of the above-described second answer signal.
Public/Granted literature
- US20090189078A1 INSPECTION APPARATUS AND INSPECTION METHOD BY USING TERAHERTZ WAVE Public/Granted day:2009-07-30
Information query
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