Invention Grant
- Patent Title: Interconnect components of a semiconductor device
- Patent Title (中): 半导体器件的互连部件
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Application No.: US12351015Application Date: 2009-01-09
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Publication No.: US07919819B2Publication Date: 2011-04-05
- Inventor: Anthony Correale, Jr.
- Applicant: Anthony Correale, Jr.
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Schubert Law Group PLLC
- Agent Ian D. MacKinnon
- Main IPC: H01L29/72
- IPC: H01L29/72

Abstract:
Embodiments comprise an adjusted polysilicon gate pitch to metal wire pitch relationship to improve area scalars while increasing ACLV tolerance with a fixed polysilicon gate pitch. In some embodiments, the wire pitch for at least one metallization layer is adjusted to match the pitch for the polysilicon gate. In one embodiment, the next to the lowest metallization layer running in the same orientation as the polysilicon gate, utilized to access the input or output of the interconnected cell structures is relaxed to match the minimum contacted gate pitch and the metal is aligned above each polysilicon gate. In another embodiment, the polysilicon gate pitch may be relaxed to attain a smaller lowest common multiple with the wire pitch for an integrated circuit to reduce the minimum step off.
Public/Granted literature
- US20090114952A1 Interconnect Components of a Semiconductor Device Public/Granted day:2009-05-07
Information query
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