Invention Grant
- Patent Title: CMOS semiconductor device and method of fabricating the same
- Patent Title (中): CMOS半导体器件及其制造方法
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Application No.: US12007433Application Date: 2008-01-10
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Publication No.: US07919820B2Publication Date: 2011-04-05
- Inventor: Young-su Chung , Hyung-suk Jung , Sung Heo , Hion-suck Baik
- Applicant: Young-su Chung , Hyung-suk Jung , Sung Heo , Hion-suck Baik
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2007-0020593 20070228
- Main IPC: H01L29/00
- IPC: H01L29/00

Abstract:
Example embodiments provide a complementary metal-oxide semiconductor (CMOS) semiconductor device and a method of fabricating the CMOS semiconductor device. The CMOS semiconductor device may include gates in the nMOS and pMOS areas, polycrystalline silicon (poly-Si) capping layers, metal nitride layers underneath the poly-Si capping layers, and a gate insulating layer underneath the gate. The metal nitride layers of the nMOS and pMOS areas may be formed of the same type of material and may have different work functions. Since a metal gate is formed of identical types of metal nitride layers, a process may be simplified, yield may be increased, and a higher-performance CMOS semiconductor device may be obtained.
Public/Granted literature
- US20080203488A1 CMOS semiconductor device and method of fabricating the same Public/Granted day:2008-08-28
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