Invention Grant
US07919870B2 Coaxial through chip connection 有权
同轴通芯片连接

Coaxial through chip connection
Abstract:
An integrated circuit chip includes devices formed by doping of a semiconductor on a substrate and at least one post-device formation through-chip via made up of an annulus of insulating material, an annulus of metallization bounding an outer surface of the annulus of insulating material and an annulus of electrically conductive material within the annulus of insulating material, the annulus of metallization and the annulus of electrically conductive material being electrically isolated from each another.
Public/Granted literature
Information query
Patent Agency Ranking
0/0