Invention Grant
- Patent Title: Micromagnetic device and method of forming the same
- Patent Title (中): 微磁装置及其形成方法
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Application No.: US11852688Application Date: 2007-09-10
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Publication No.: US07920042B2Publication Date: 2011-04-05
- Inventor: Ashraf W. Lotfi , Trifon M. Liakopoulos , Robert W. Filas , Amrit Panda
- Applicant: Ashraf W. Lotfi , Trifon M. Liakopoulos , Robert W. Filas , Amrit Panda
- Applicant Address: US NJ Hampton
- Assignee: Enpirion, Inc.
- Current Assignee: Enpirion, Inc.
- Current Assignee Address: US NJ Hampton
- Agency: Slater & Matsil, L.L.P.
- Main IPC: H01F5/00
- IPC: H01F5/00

Abstract:
A micromagnetic device includes a first insulating layer formed above a substrate, a first seed layer formed above the first insulating layer, a first conductive winding layer selectively formed above the first seed layer, and a second insulating layer formed above the first conductive winding layer. The micromagnetic device also includes a first magnetic core layer formed above the second insulating layer, a third insulating layer formed above the first magnetic core layer, and a second magnetic core layer formed above the third insulating layer. The micromagnetic device still further includes a fourth insulating layer formed above the second magnetic core layer, a second seed layer formed above the fourth insulating layer, and a second conductive winding layer formed above the second seed layer and in vias to the first conductive winding layer. The first and second conductive winding layers form a winding for the micromagnetic device.
Public/Granted literature
- US20090068400A1 Micromagnetic Device and Method of Forming the Same Public/Granted day:2009-03-12
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