Invention Grant
US07920338B2 Reduction projection objective and projection exposure apparatus including the same 有权
还原投影物镜和包括其的投影曝光设备

Reduction projection objective and projection exposure apparatus including the same
Abstract:
A reduction projection objective for projection lithography has a plurality of optical elements arranged along an optical axis and designed for imaging an effective object field arranged in an object surface of the projection objective into an effective image field arranged in an image surface of the projection objective at a reducing magnification ratio. The optical elements include at least one concave mirror. The optical elements are designed to provide an image-side numerical aperture NA>0.6 in a large effective image field having a maximum image field height Y′>25 mm. A compact, low mass projection objective enabling high throughput of exposed substrates is thereby obtained.
Information query
Patent Agency Ranking
0/0