Invention Grant
- Patent Title: Reduction projection objective and projection exposure apparatus including the same
- Patent Title (中): 还原投影物镜和包括其的投影曝光设备
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Application No.: US11723854Application Date: 2007-03-22
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Publication No.: US07920338B2Publication Date: 2011-04-05
- Inventor: Wilhelm Ulrich , Aurelian Dodoc
- Applicant: Wilhelm Ulrich , Aurelian Dodoc
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Sughrue Mion, PLLC
- Main IPC: G02B17/08
- IPC: G02B17/08

Abstract:
A reduction projection objective for projection lithography has a plurality of optical elements arranged along an optical axis and designed for imaging an effective object field arranged in an object surface of the projection objective into an effective image field arranged in an image surface of the projection objective at a reducing magnification ratio. The optical elements include at least one concave mirror. The optical elements are designed to provide an image-side numerical aperture NA>0.6 in a large effective image field having a maximum image field height Y′>25 mm. A compact, low mass projection objective enabling high throughput of exposed substrates is thereby obtained.
Public/Granted literature
- US20070252094A1 Reduction projection objective and projection exposure apparatus including the same Public/Granted day:2007-11-01
Information query
IPC分类:
G | 物理 |
G02 | 光学 |
G02B | 光学元件、系统或仪器 |
G02B17/00 | 有或无折射元件的具有反射面的系统 |
G02B17/08 | .折反射系统 |