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US07920369B2 Apparatus and method for nano plasma deposition 有权
用于纳米等离子体沉积的装置和方法

Apparatus and method for nano plasma deposition
Abstract:
An apparatus and method for initiation and control of a sustained metal plasma and nano plasma (macroparticulate) deposition methods for preparing modified metal coatings are provided. The plasma deposition process can be tightly controlled by virtue of a device that incorporates a plasma arc initiator component and an internal power supply that is capable of controlling dwell time on the target and the size range of particles ejected in the plasma arc.
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