Invention Grant
- Patent Title: Exposure device and circuit board for laser controller
- Patent Title (中): 激光控制器曝光装置和电路板
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Application No.: US12081637Application Date: 2008-04-18
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Publication No.: US07920609B2Publication Date: 2011-04-05
- Inventor: Toshimitsu Hamagishi , Mamoru Fujimoto
- Applicant: Toshimitsu Hamagishi , Mamoru Fujimoto
- Applicant Address: JP Kyoto
- Assignee: Dainippon Screen Mfg. Co., Ltd.
- Current Assignee: Dainippon Screen Mfg. Co., Ltd.
- Current Assignee Address: JP Kyoto
- Agency: McDermott Will & Emery LLP
- Priority: JP2007-111495 20070420
- Main IPC: H01S3/13
- IPC: H01S3/13 ; B41J2/435

Abstract:
In an exposure device comprising a laser controller that is configured as a circuit board capable of independently being changed, and that controls the emission of laser light from a laser emitter emitting laser light on receipt of an instruction for control given from a main controller responsible for overall control of the operation of the exposure device, error control information that is obtained in advance with regard to the circuit board and controls variations of a controlling factor due to a circuit error of the circuit board is stored into a memory provided to the laser controller prior to the provision of the circuit board to the exposure device. On receipt of an instruction for control given from the main controller to cause the emission of laser light in a predetermined amount of light, the laser controller determines a condition of emission of laser light based on the error control information stored in the memory to cause the laser emitter to emit laser light under the condition of emission.
Public/Granted literature
- US20080259978A1 Exposure device and circuit board for laser controller Public/Granted day:2008-10-23
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