Invention Grant
- Patent Title: Laser system
- Patent Title (中): 激光系统
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Application No.: US11980172Application Date: 2007-10-30
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Publication No.: US07920616B2Publication Date: 2011-04-05
- Inventor: Daniel J. W. Brown , William N. Partlo , Richard L. Sandstrom
- Applicant: Daniel J. W. Brown , William N. Partlo , Richard L. Sandstrom
- Applicant Address: US CA San Diego
- Assignee: Cymer, Inc.
- Current Assignee: Cymer, Inc.
- Current Assignee Address: US CA San Diego
- Agency: DiBerardino Law LLC
- Main IPC: H01S3/22
- IPC: H01S3/22

Abstract:
A method/apparatus may comprise a laser light source which may comprise a solid state seed laser system producing a seed laser output having a nominal center wavelength at a pulse repetition rate; a first and a second gas discharge laser amplifier gain medium each operating at a pulse repetition rate less than that of the seed laser system; a beam divider providing each of the respective first and second amplifier gain mediums with seed laser output pulses; a frequency converter modifying the nominal center wavelength of the output of the seed laser to essentially the nominal center wavelength of the amplifier gain medium; a beam combiner combining the outputs of the respective amplifier gain mediums to provide a light source output having the pulse repetition rate of the seed laser; a coherence buster operating on either or both of the output of the seed laser or amplifier gain mediums.
Public/Granted literature
- US20090067468A1 Laser system Public/Granted day:2009-03-12
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