Invention Grant
- Patent Title: Nanotip repair and characterization using field ion microscopy
- Patent Title (中): 纳米技术使用场离子显微镜修复和表征
-
Application No.: US12191855Application Date: 2008-08-14
-
Publication No.: US07921465B2Publication Date: 2011-04-05
- Inventor: Vladimir Ukraintsev
- Applicant: Vladimir Ukraintsev
- Applicant Address: US TX Dallas
- Assignee: Texas Instruments Incorporated
- Current Assignee: Texas Instruments Incorporated
- Current Assignee Address: US TX Dallas
- Agent Wade J. Brady, III; Frederick J. Telecky, Jr
- Main IPC: G01Q40/00
- IPC: G01Q40/00

Abstract:
A system (100) for characterizing surfaces can include a nanotip microscope (104) in a first pressure envelope (102) at a first pressure with an electrically conductive nanotip (110) mounted thereon for characterizing a sample surface. The system can also include an ion imaging system (122, 124, 128) within a second pressure envelope (120) at a second pressure. The second pressure can less than or equal to the first pressure and the pressure envelopes (102, 120) can be separated by a pressure limiting aperture (PLA) (132). The system can further include gas sources (116, 118) for introducing into the first pressure envelope (102) at least one gas, and a voltage supply (114) coupled to the nanotip (110) for generating an electric field between the nanotip (114) and the PLA (132). In the system, the electric field repels and ionizes molecules or atoms of the gas in proximity to the nanotip (110) and the ion imaging system (122, 124, 128) collects at least a portion the repelled and ionized molecules or atoms traversing the PLA (132) to image the nanotip (110).
Public/Granted literature
- US20100038536A1 NANOTIP REPAIR AND CHARACTERIZATION USING FIELD ION MICROSCOPY Public/Granted day:2010-02-18
Information query