Invention Grant
- Patent Title: Microfluidic device and method of operation
- Patent Title (中): 微流体装置及其操作方法
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Application No.: US12369118Application Date: 2009-02-11
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Publication No.: US07921737B2Publication Date: 2011-04-12
- Inventor: Douglas Ray Sparks , Richard Thayre Smith , Nader Najafi
- Applicant: Douglas Ray Sparks , Richard Thayre Smith , Nader Najafi
- Applicant Address: US MI Ypsilanti
- Assignee: Integrated Sensing Systems, Inc.
- Current Assignee: Integrated Sensing Systems, Inc.
- Current Assignee Address: US MI Ypsilanti
- Agency: Hartman & Hartman, P.C.
- Agent Gary M. Hartman; Domenica N. S. Hartman
- Main IPC: G01F1/84
- IPC: G01F1/84

Abstract:
A microelectromechanical system (MEMS) device and method for operating the device to determine a property of a fluid. The device has a tube that extends from a base and is spaced apart from a substrate surface for vibrational movement in a plane normal to the surface. The tube defines a continuous internal passage having a fluid inlet and fluid outlet fluidically connected to the base. A cantilevered member attached to a distal portion of the tube opposite the base is configured for vibrational movement relative to the distal portion. A drive electrode operable to induce vibrational movements in the tube and cantilevered member is disposed on the substrate surface. Sensing electrodes are disposed on the substrate surface for sensing Coriolis-induced deflections of the tube when vibrated, generating outputs from which a property of a fluid flowing through the tube can be determined.
Public/Granted literature
- US20100037708A1 MICROFLUIDIC DEVICE AND METHOD OF OPERATION Public/Granted day:2010-02-18
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