Invention Grant
US07922301B2 Liquid transport apparatus and method for producing liquid transport apparatus 有权
液体输送装置及其制造方法

Liquid transport apparatus and method for producing liquid transport apparatus
Abstract:
A piezoelectric actuator includes a vibration plate, a plurality of individual electrodes, wiring sections each extending from corresponding one of the individual electrodes and passing between the other individual electrodes other than the corresponding individual electrode, a piezoelectric layer arranged on the vibration plate to cover the individual electrodes, and a common electrode arranged on a surface of the piezoelectric layer disposed on a side opposite to the piezoelectric layer. At least portions of the plurality of wiring sections, each of which is allowed to pass between the another individual electrodes, are covered with a second insulating layer. Accordingly, it is possible to suppress the occurrence of the strain of the piezoelectric layer in the area between the individual electrodes through which the wiring section is allowed to pass, without providing any complicated shape of the common electrode in which the common electrode is partially cut out.
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