Invention Grant
US07922815B2 System and method for epitaxial deposition of a crystal using a liquid-solvent fluidized-bed mechanism 有权
使用液体溶剂流化床机理外延沉积晶体的系统和方法

  • Patent Title: System and method for epitaxial deposition of a crystal using a liquid-solvent fluidized-bed mechanism
  • Patent Title (中): 使用液体溶剂流化床机理外延沉积晶体的系统和方法
  • Application No.: US12485016
    Application Date: 2009-06-15
  • Publication No.: US07922815B2
    Publication Date: 2011-04-12
  • Inventor: Zalman M. Shapiro
  • Applicant: Zalman M. Shapiro
  • Agency: Lemaire Patent Law Firm, P.L.L.C.
  • Agent Charles A. Lemaire; Jonathan M. Rixen
  • Main IPC: C30B29/04
  • IPC: C30B29/04
System and method for epitaxial deposition of a crystal using a liquid-solvent fluidized-bed mechanism
Abstract:
A system and method for growing diamond crystals from diamond crystal seeds by epitaxial deposition at low temperatures and atmospheric and comparatively low pressures. A solvent is circulated (by thermal convection and/or pumping), wherein carbon is added in a hot leg, transfers to a cold leg having, in some embodiments, a range of progressively lowered temperatures and concentrations of carbon via the circulating solvent, and deposits layer-by-layer on diamond seeds located at the progressively lower temperatures since as diamond deposits the carbon concentration lowers and the temperature is lowered to keep the solvent supersaturated. The solvent includes metal(s) or compound(s) that have low melting temperatures and transfer carbon at comparatively low temperatures. A controller receives parameter signals from a variety of sensors located in the system, processes these signals, and optimizes diamond deposition by outputting the necessary control signals to a plurality of control devices (e.g., valves, heaters, coolers, pumps).
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