Invention Grant
US07923114B2 Hydrophilic coatings, methods for depositing hydrophilic coatings, and improved deposition technology for thin films 有权
亲水性涂料,沉积亲水性涂料的方法和改进的薄膜沉积技术

Hydrophilic coatings, methods for depositing hydrophilic coatings, and improved deposition technology for thin films
Abstract:
The invention provides certain embodiments that involve sputtering techniques for applying a mixed oxide film comprising silica and titania. In these embodiments, the techniques involve sputtering at least two targets in a common chamber (e.g., in a shared gaseous atmosphere). A first of these targets includes silicon, while a second of the targets includes titanium. Further, the invention provides embodiments involving a substrate bearing a hydrophilic coating, which can be deposited by sputtering or any other suitable thin film deposition technique. The invention also provides techniques and apparatuses useful for depositing a wide variety of coating types. For example, the invention provides thin film deposition technologies in which sputtering apparatuses or other thin film deposition apparatuses are employed.
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