Invention Grant
US07923192B2 Base material for pattern-forming material, positive resist composition and method of resist pattern formation
有权
用于图案形成材料的基材,正型抗蚀剂组合物和抗蚀图案形成方法
- Patent Title: Base material for pattern-forming material, positive resist composition and method of resist pattern formation
- Patent Title (中): 用于图案形成材料的基材,正型抗蚀剂组合物和抗蚀图案形成方法
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Application No.: US10590046Application Date: 2005-02-08
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Publication No.: US07923192B2Publication Date: 2011-04-12
- Inventor: Taku Hirayama , Daiju Shiono , Tasuku Matsumiya , Yohei Kinoshita
- Applicant: Taku Hirayama , Daiju Shiono , Tasuku Matsumiya , Yohei Kinoshita
- Applicant Address: JP Kawasaki-shi
- Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee Address: JP Kawasaki-shi
- Agency: Knobbe, Martens, Olson & Bear LLP
- Priority: JPP2004-045043 20040220; JPP2004-045044 20040220; JPP2004-182300 20040621; JPP2004-182301 20040621
- International Application: PCT/JP2005/001798 WO 20050208
- International Announcement: WO2005/081062 WO 20050901
- Main IPC: G03C1/00
- IPC: G03C1/00 ; G03F7/00 ; G03F1/00

Abstract:
A base material for a pattern-forming material, a positive resist composition, and a method of resist pattern formation that are capable of forming a high resolution pattern with reduced levels of LER. The base material includes a low molecular weight compound (X1), which is formed from a polyhydric phenol compound (x) that contains two or more phenolic hydroxyl groups and satisfies the conditions (1), (2), and (3) described below, wherein either a portion of, or all of, the phenolic hydroxyl groups are protected with acid dissociable, dissolution inhibiting groups: (1) a molecular weight within a range from 300 to 2,500, (2) a molecular weight dispersity of no more than 1.5, and (3) an ability to form an amorphous film using a spin coating method. Alternatively, the base material includes a protected material (Y1), which is formed from a polyhydric phenol compound (y) that contains two or more phenolic hydroxyl groups and has a molecular weight within a range from 300 to 2,500, in which a predetermined proportion of the phenolic hydroxyl groups are protected with acid dissociable, dissolution inhibiting groups.
Public/Granted literature
- US20070281243A1 Base Material for Pattern Forming Material, Positive Resist Composition and Method of Resist Formation Public/Granted day:2007-12-06
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