Invention Grant
US07923194B2 Sacrificial compositions and methods of fabricating a structure using sacrificial compositions 有权
牺牲组合物和使用牺牲组合物制造结构的方法

Sacrificial compositions and methods of fabricating a structure using sacrificial compositions
Abstract:
Compositions, methods of use thereof, and methods of decomposition thereof, are provided. One exemplary composition, among others, includes a polymer and a catalytic amount of a negative tone photoinitiator.
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