Invention Grant
- Patent Title: Methods for preparation of high-purity polysilicon rods using a metallic core means
- Patent Title (中): 使用金属芯制备高纯度多晶硅棒的方法
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Application No.: US12603072Application Date: 2009-10-21
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Publication No.: US07923358B2Publication Date: 2011-04-12
- Inventor: Hee Young Kim , Kyung Koo Yoon , Yong Ki Park , Won Choon Choi , Sang Jin Moon
- Applicant: Hee Young Kim , Kyung Koo Yoon , Yong Ki Park , Won Choon Choi , Sang Jin Moon
- Applicant Address: KR Daejeon
- Assignee: Korea Research Institute of Chemical Technology
- Current Assignee: Korea Research Institute of Chemical Technology
- Current Assignee Address: KR Daejeon
- Agency: Frommer Lawrence & Haug LLP
- Agent Ronald R. Santucci
- Priority: KR10-2006-0045707 20060522
- Main IPC: C23C16/24
- IPC: C23C16/24

Abstract:
The present invention relates to a method for preparing a polysilicon rod using a metallic core means, comprising: installing a core means in an inner space of a deposition reactor used for preparing a silicon rod, wherein the core means is constituted by forming one or a plurality of separation layer(s) on the surface of a metallic core element and is connected to an electrode means; heating the core means by supplying electricity through the electrode means; and supplying a reaction gas into the inner space for silicon deposition, thereby forming a deposition output in an outward direction on the surface of the core means. According to the present invention, the deposition output and the core means can be separated easily from the silicon rod output obtained by the process of silicon deposition, and the contamination of the deposition output caused by impurities of the metallic core element can be minimized, thereby a high-purity silicon can be prepared in a more economic and convenient way.
Public/Granted literature
- US20100041215A1 METHODS FOR PREPARATION OF HIGH-PURITY POLYSILICON RODS USING A METALLIC CORE MEANS Public/Granted day:2010-02-18
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