Invention Grant
US07923362B2 Method for manufacturing a metal-semiconductor contact in semiconductor components
失效
半导体元件中的金属 - 半导体接触的制造方法
- Patent Title: Method for manufacturing a metal-semiconductor contact in semiconductor components
- Patent Title (中): 半导体元件中的金属 - 半导体接触的制造方法
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Application No.: US11447094Application Date: 2006-06-06
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Publication No.: US07923362B2Publication Date: 2011-04-12
- Inventor: Franz Dietz , Volker Dudek , Tobias Florian , Michael Graf
- Applicant: Franz Dietz , Volker Dudek , Tobias Florian , Michael Graf
- Applicant Address: DE Heilbronn
- Assignee: TELEFUNKEN Semiconductors GmbH & Co. KG
- Current Assignee: TELEFUNKEN Semiconductors GmbH & Co. KG
- Current Assignee Address: DE Heilbronn
- Agency: Muncy, Geissler, Olds & Lowe, PLLC
- Priority: DE102005026301 20050608
- Main IPC: H01L21/28
- IPC: H01L21/28

Abstract:
A method for manufacturing a metal-semiconductor contact in semiconductor Components is disclosed. There is a relatively high risk of contamination in the course of metal depositions in prior-art methods. In the disclosed method, the actual metal -semiconductor or Schottky contact is produced only after the application of a protective layer system, as a result of which it is possible to use any metals, particularly platinum, without the risk of contamination.
Public/Granted literature
- US20060281291A1 Method for manufacturing a metal-semiconductor contact in semiconductor components Public/Granted day:2006-12-14
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