Invention Grant
US07923362B2 Method for manufacturing a metal-semiconductor contact in semiconductor components 失效
半导体元件中的金属 - 半导体接触的制造方法

Method for manufacturing a metal-semiconductor contact in semiconductor components
Abstract:
A method for manufacturing a metal-semiconductor contact in semiconductor Components is disclosed. There is a relatively high risk of contamination in the course of metal depositions in prior-art methods. In the disclosed method, the actual metal -semiconductor or Schottky contact is produced only after the application of a protective layer system, as a result of which it is possible to use any metals, particularly platinum, without the risk of contamination.
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