Invention Grant
- Patent Title: Pitch multiplication using self-assembling materials
- Patent Title (中): 使用自组装材料进行倍增
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Application No.: US11757846Application Date: 2007-06-04
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Publication No.: US07923373B2Publication Date: 2011-04-12
- Inventor: Gurtej Sandhu
- Applicant: Gurtej Sandhu
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Knobbe, Martens, Olson & Bear, LLP
- Main IPC: H01L21/311
- IPC: H01L21/311

Abstract:
Self-assembling materials, such as block copolymers, are used as mandrels for pitch multiplication. The copolymers are deposited over a substrate and directed to self-assemble into a desired pattern. One of the blocks forming the block copolymers is selectively removed. The remaining blocks are used as mandrels for pitch multiplication. Spacer material is blanket deposited over the blocks. The spacer material is subjected to a spacer etch to form spacers on sidewalls of the mandrels. The mandrels are selectively removed to leave free-standing spacers. The spacers may be used as pitch-multiplied mask features to define a pattern in an underlying substrate.
Public/Granted literature
- US20080299774A1 PITCH MULTIPLICATION USING SELF-ASSEMBLING MATERIALS Public/Granted day:2008-12-04
Information query
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