Invention Grant
- Patent Title: Titania-doped quartz glass for nanoimprint molds
- Patent Title (中): 用于纳米压印模具的二氧化钛掺杂石英玻璃
-
Application No.: US12132922Application Date: 2008-06-04
-
Publication No.: US07923394B2Publication Date: 2011-04-12
- Inventor: Shigeru Maida , Hisatoshi Otsuka
- Applicant: Shigeru Maida , Hisatoshi Otsuka
- Applicant Address: JP Tokyo
- Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee: Shin-Etsu Chemical Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2007-150561 20070606
- Main IPC: C03C3/06
- IPC: C03C3/06 ; C03C3/04 ; C03C3/076
Abstract:
In the nanoimprint lithography, titania-doped quartz glass having an internal transmittance distribution of up to 10% at wavelength 365 nm is suited for use as nanoimprint molds.
Public/Granted literature
- US20080305940A1 TITANIA-DOPED QUARTZ GLASS FOR NANOIMPRINT MOLDS Public/Granted day:2008-12-11
Information query
