Invention Grant
US07923723B2 Thin-film transistor and display device using oxide semiconductor
有权
薄膜晶体管和使用氧化物半导体的显示器件
- Patent Title: Thin-film transistor and display device using oxide semiconductor
- Patent Title (中): 薄膜晶体管和使用氧化物半导体的显示器件
-
Application No.: US12281783Application Date: 2007-02-23
-
Publication No.: US07923723B2Publication Date: 2011-04-12
- Inventor: Ryo Hayashi , Katsumi Abe , Masafumi Sano
- Applicant: Ryo Hayashi , Katsumi Abe , Masafumi Sano
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2006-074627 20060317
- International Application: PCT/JP2007/053981 WO 20070223
- International Announcement: WO2007/108293 WO 20070927
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L31/0376 ; H01L29/04

Abstract:
The thin-film transistor of the present invention has at least a semiconductor layer including: on a substrate, a source electrode, a drain electrode, and a channel region; a gate insulating film; and a gate electrode, wherein the semiconductor layer is an oxide semiconductor layer, and wherein the gate insulating film is amorphous silicon including at least O and N, and the gate insulating film has a distribution of an oxygen concentration in a thickness direction so that the oxygen concentration is high in the side of an interface with an oxide semiconductor layer and the oxygen concentration decreases toward the side of the gate electrode.
Public/Granted literature
- US20090072232A1 Thin-Film Transistor and Display Device using Oxide Semiconductor Public/Granted day:2009-03-19
Information query
IPC分类: