Invention Grant
- Patent Title: BLM structure for application to copper pad
- Patent Title (中): BLM结构应用于铜垫
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Application No.: US11459119Application Date: 2006-07-21
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Publication No.: US07923836B2Publication Date: 2011-04-12
- Inventor: Mukta G. Farooq , Tien-Jen Cheng , Roger A. Quon
- Applicant: Mukta G. Farooq , Tien-Jen Cheng , Roger A. Quon
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Katherine S. Brown; Lisa U. Jaklitsch; Daryl K. Neff
- Main IPC: H01L23/48
- IPC: H01L23/48

Abstract:
A microelectronic element and a related method for fabricating such is provided. The microelectronic element comprises a contact pad overlying a major surface of a substrate. The contact pad has a composition including copper at a contact surface. A passivation layer is also provided overlying the major surface of the substrate. The passivation layer overlies the contact pad such that it exposes at least a portion of the contact surface. A plurality of metal layers arranged in a stack overlie the contact surface and at least a portion of the passivation layer. The stack includes multiple layers, which can have different thicknesses and different metals, with the lowest layer including titanium (Ti) and nickel (Ni) in contact with the contact surface.
Public/Granted literature
- US20080017984A1 BLM STRUCTURE FOR APPLICATION TO COPPER PAD Public/Granted day:2008-01-24
Information query
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