Invention Grant
US07923894B2 Actuator, image projection apparatus and production method for actuator
失效
执行机构,图像投影装置及执行机构的制作方法
- Patent Title: Actuator, image projection apparatus and production method for actuator
- Patent Title (中): 执行机构,图像投影装置及执行机构的制作方法
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Application No.: US12447503Application Date: 2007-12-03
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Publication No.: US07923894B2Publication Date: 2011-04-12
- Inventor: Hiroshi Obi , Hironori Tomita , Akira Kurozuka
- Applicant: Hiroshi Obi , Hironori Tomita , Akira Kurozuka
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Agency: Renner, Otto, Boisselle & Sklar, LLP
- Priority: JP2006-327741 20061205
- International Application: PCT/JP2007/073329 WO 20071203
- International Announcement: WO2008/069176 WO 20080612
- Main IPC: G02B26/08
- IPC: G02B26/08 ; H02N1/00

Abstract:
The present invention is directed to a bi-axial pivoting type actuator having a first movable section, a second movable section supporting the first movable section, and backlining. A first conductive portion and a second conductive portion for independently applying a driving voltage to each of the first movable section and the second movable section are provided on the second movable section, in a state of being split by isolation trenches and being stabilized by the backlining provided under the second movable section. By providing such backlining, mutual stabilization of the first conductive portion and the second conductive portion in an electrically isolated state, and simplification of the production steps for the actuator are realized. By providing a mirror on the first conductive portion of the actuator of the present invention as such, it becomes possible to provide a bi-axial pivoting type mirror device through a simple production process.
Public/Granted literature
- US20100067078A1 ACTUATOR Public/Granted day:2010-03-18
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