Invention Grant
US07924018B2 MEMS electrometer that measures amount of repulsion of adjacent beams from each other for static field detection
有权
MEMS静电计，用于测量相邻光束相对于静态场检测的排斥量
- Patent Title: MEMS electrometer that measures amount of repulsion of adjacent beams from each other for static field detection
- Patent Title (中): MEMS静电计，用于测量相邻光束相对于静态场检测的排斥量
-
Application No.: US12340055Application Date: 2008-12-19
-
Publication No.: US07924018B2Publication Date: 2011-04-12
- Inventor: Roger J. Peirce
- Applicant: Roger J. Peirce
- Applicant Address: US IL Glenview
- Assignee: Illinois Tool Works Inc.
- Current Assignee: Illinois Tool Works Inc.
- Current Assignee Address: US IL Glenview
- Agency: Panitch Schwarze Belisario & Nadel LLP
- Main IPC: G01R29/12
- IPC: G01R29/12
Abstract:
An apparatus for detecting a static field includes a microelectromechanical systems (MEMS) device having two cantilevered beams of conductive material that are adjacent and substantially parallel to each other. The two beams repel each other in the presence of a static field. At least one sensor detects a respective amount of displacement of the two cantilevered beams from a rest position and determines an amount of repulsion of the two cantilevered beams from each other.
Public/Granted literature
Information query
