Invention Grant
- Patent Title: Piezoelectric resonator and piezoelectric filter having a heat-radiating film
- Patent Title (中): 具有散热膜的压电谐振器和压电滤波器
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Application No.: US12495889Application Date: 2009-07-01
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Publication No.: US07924120B2Publication Date: 2011-04-12
- Inventor: Keiichi Umeda
- Applicant: Keiichi Umeda
- Applicant Address: JP Kyoto
- Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee Address: JP Kyoto
- Agency: Keating & Bennett, LLP
- Priority: JP2007-013846 20070124
- Main IPC: H03H9/08
- IPC: H03H9/08 ; H03H9/15 ; H03H9/54

Abstract:
A piezoelectric resonator includes a substrate and a thin-film section. The thin-film section includes a first thin-film section supported by the substrate, and an acoustically-isolated second thin-film section which is separated from the substrate. In the second thin-film section, first and second electrodes are arranged on the respective main surfaces of a piezoelectric film, and a vibration section is provided at an area where the first and the second electrodes overlap each other on the second thin-film section when viewed through in the film-thickness direction. The thin-film section further includes a heat-radiating film which is in contact with peripheral edges of at least the first electrode among the first and second electrodes defining portions of a periphery of the vibration section, and which extends from the peripheral edges to the first thin-film section when viewed through in the film-thickness direction.
Public/Granted literature
- US20090261922A1 PIEZOELECTRIC RESONATOR AND PIEZOELECTRIC FILTER Public/Granted day:2009-10-22
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