Invention Grant
- Patent Title: Illumination system for optical inspection
- Patent Title (中): 光学检查照明系统
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Application No.: US12626592Application Date: 2009-11-25
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Publication No.: US07924419B2Publication Date: 2011-04-12
- Inventor: Ron Naftali , Avishay Guetta , Haim Feldman , Doron Shoham
- Applicant: Ron Naftali , Avishay Guetta , Haim Feldman , Doron Shoham
- Applicant Address: IL Rehovot US CA Santa Clara
- Assignee: Applied Materials Israel, Ltd.,Applied Materials, Inc.
- Current Assignee: Applied Materials Israel, Ltd.,Applied Materials, Inc.
- Current Assignee Address: IL Rehovot US CA Santa Clara
- Agency: SNR Denton US LLP
- Main IPC: G01N21/00
- IPC: G01N21/00

Abstract:
Apparatus for generating optical radiation includes a laser, which is configured to operate in multiple transverse modes simultaneously so as to generate an input beam, which is characterized by a first speckle contrast. The transverse modes of the input beam are optically mixed so as to generate an output beam have a second speckle contrast, which is substantially less than the first speckle contrast.
Public/Granted literature
- US20100097680A1 ILLUMINATION SYSTEM FOR OPTICAL INSPECTION Public/Granted day:2010-04-22
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