Invention Grant
- Patent Title: Information processing apparatus for interference signal processing
- Patent Title (中): 用于干扰信号处理的信息处理装置
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Application No.: US12032205Application Date: 2008-02-15
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Publication No.: US07924426B2Publication Date: 2011-04-12
- Inventor: Tomoyuki Miyashita , Takahiro Matsumoto , Hideki Ina
- Applicant: Tomoyuki Miyashita , Takahiro Matsumoto , Hideki Ina
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc., IP Division
- Priority: JP2007-041277 20070221; JP2007-140863 20070528
- Main IPC: G01B11/02
- IPC: G01B11/02 ; G01B9/02

Abstract:
A shape measuring apparatus for measuring the shape of a measurement target surface includes an interferometer and computer. The interferometer senses interference light formed by measurement light from the measurement target surface and reference light by a photoelectric converter, while changing the light path length of the measurement light or the reference light. The computer Fourier-transforms a first interference signal sensed by the photoelectric converter to obtain a phase distribution and an amplitude distribution, shapes the amplitude distribution, inversely Fourier-transforms the phase distribution and the shaped amplitude distribution to obtain a second interference signal, and determines the shape of the measurement target surface based on the second interference signal.
Public/Granted literature
- US20080285052A1 SHAPE MEASURING APPARATUS, EXPOSURE APPARATUS, AND COMPUTER Public/Granted day:2008-11-20
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