Invention Grant
- Patent Title: Hidden micromirror support structure
- Patent Title (中): 隐藏的微镜支撑结构
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Application No.: US12419103Application Date: 2009-04-06
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Publication No.: US07924489B2Publication Date: 2011-04-12
- Inventor: David A. Rothenbury
- Applicant: David A. Rothenbury
- Applicant Address: US TX Dallas
- Assignee: Texas Instruments Incorporated
- Current Assignee: Texas Instruments Incorporated
- Current Assignee Address: US TX Dallas
- Agent Charles A. Brill; Wade James Brady, III; Frederick J. Telecky, Jr.
- Main IPC: G02B26/08
- IPC: G02B26/08 ; C23C14/00 ; B29D11/00

Abstract:
Methods and apparatus for use with a micromirror element includes a micromirror a micromirror having a substantially flat outer surface disposed outwardly from a support structure that is operable to at least partially support the micromirror. The support structure includes at least one layer overlying at least two discrete planes that are both substantially parallel to the outer surface of the micromirror. In one particular embodiment, the support structure includes annular-shaped sidewalls that encapsulate a photoresist plug.
Public/Granted literature
- US20090188786A1 Hidden Micromirror Support Structure Public/Granted day:2009-07-30
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