In a semiconductor device including an N-line M-stage shift register circuit operated at high speed of, for example, several hundreds MHz. Input circuits input a common test pattern to each of pairs of shift registers in, for example, two lines out of the N lines. A plurality of outputs of the pairs of shift registers in the two lines are compared in comparators, and the comparison results are output. The N-line M-stage shift register circuit and the comparators are operated in synchronization with a clock signal at several hundreds MHz. Hence, even when the circuit scale (area) of the N-line M-stage shift register circuit is increased to involve apparent wiring delay, a defect in the shift register circuit can be detected at an actual speed.