Invention Grant
US07926007B2 Writing apparatus, writing data conversion method, and computer-readable recording medium storing program using Huffman tree for converting writing data in lithographic process
有权
写入装置，写入数据转换方法以及使用霍夫曼树存储程序的计算机可读记录介质，用于在光刻处理中转换写入数据
- Patent Title: Writing apparatus, writing data conversion method, and computer-readable recording medium storing program using Huffman tree for converting writing data in lithographic process
- Patent Title (中): 写入装置，写入数据转换方法以及使用霍夫曼树存储程序的计算机可读记录介质，用于在光刻处理中转换写入数据
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Application No.: US12360214Application Date: 2009-01-27
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Publication No.: US07926007B2Publication Date: 2011-04-12
- Inventor: Hayato Shibata
- Applicant: Hayato Shibata
- Applicant Address: JP Numazu-shi
- Assignee: NuFlare Technology, Inc.
- Current Assignee: NuFlare Technology, Inc.
- Current Assignee Address: JP Numazu-shi
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2008-023577 20080204
- Main IPC: G06F17/50
- IPC: G06F17/50
Abstract:
A writing apparatus includes a unit storing writing data, a unit which acquires pattern information on patterns defined in the data, a unit which generates a table where each pattern information corresponds to a number of times each pattern information is used, for each predetermined region, a unit which generates a Huffman tree, based on the table, a unit which generates another table where each pattern information corresponds to a variable length binary code generated by encoding each pattern information such that the larger the number of times each pattern information is used, the smaller a value of the code, based on the tree, a unit which produces converted data, which is defined by the data, in the region into a predetermined format using the code, based on the other table, and a unit which writes the patterns defined, onto a workpiece, based on the converted data in the region.
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