Invention Grant
- Patent Title: Multi-place coating apparatus and process for plasma coating
- Patent Title (中): 多层涂装设备及等离子涂层工艺
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Application No.: US10515084Application Date: 2003-05-26
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Publication No.: US07926446B2Publication Date: 2011-04-19
- Inventor: Stephan Behle , Andreas Luttringhaus-Henkel , Gregor Arnold , Mathias Bicker , Marten Walther , Juergen Klein
- Applicant: Stephan Behle , Andreas Luttringhaus-Henkel , Gregor Arnold , Mathias Bicker , Marten Walther , Juergen Klein
- Applicant Address: DE Mainz
- Assignee: Schott AG
- Current Assignee: Schott AG
- Current Assignee Address: DE Mainz
- Agency: Ohlandt, Greeley, Ruggiero & Perle, LLP
- Priority: DE10223288 20020524; DE10224395 20020601; DE10225607 20020607; DE10225609 20020607; DE10253512 20021116; DE10253513 20021116
- International Application: PCT/EP03/05497 WO 20030526
- International Announcement: WO03/100121 WO 20031204
- Main IPC: C23C16/511
- IPC: C23C16/511 ; C23F1/00 ; H01L21/306 ; C23C16/06 ; C23C16/22
Abstract:
A coating apparatus is provided for simplifying the introduction and removal of workpieces into and from a reactor for plasma coating and to increase the throughput. The coating apparatus has a reactor with a moveable sleeve part and a base element, at least one sealed coating chamber being defined between sleeve part and base element when the latter two parts are fitted onto one another. The coating apparatus also has a device for introducing electromagnetic energy into the at least one coating chamber. The reactor has at least two coating places.
Public/Granted literature
- US20060150909A1 Multi-place coating apparatus and process for plasma coating Public/Granted day:2006-07-13
Information query
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