Invention Grant
US07927911B2 Wafer bonded access device for multi-layer phase change memory using lock-and-key alignment
有权
用于使用锁定和键对准的多层相变存储器的晶圆接合设备
- Patent Title: Wafer bonded access device for multi-layer phase change memory using lock-and-key alignment
- Patent Title (中): 用于使用锁定和键对准的多层相变存储器的晶圆接合设备
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Application No.: US12550014Application Date: 2009-08-28
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Publication No.: US07927911B2Publication Date: 2011-04-19
- Inventor: Matthew J. Breitwisch , Kuan-Neng Chen
- Applicant: Matthew J. Breitwisch , Kuan-Neng Chen
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method for fabricating a multi-layer phase change memory device includes forming a phase change memory layer including a plurality of phase change memory elements on a word line formed on a plurality of semiconductor devices on a first semiconductor substrate, each phase change element having a notch formed at an upper surface thereof, forming an access device layer including plurality of access devices on a second semiconductor substrate, each access device having a conductive bump formed thereon, and combining the first and second semiconductor substrates and slidably inserting and locking each conductive bump of the plurality of access devices into each notch of the plurality of phase change memory elements to electrically connect the access devices to the phase change memory elements.
Public/Granted literature
- US20110049455A1 WAFER BONDED ACCESS DEVICE FOR MULTI-LAYER PHASE CHANGE MEMORY USING LOCK-AND-KEY ALIGNMENT Public/Granted day:2011-03-03
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