Invention Grant
- Patent Title: Manufacturing method for semiconductor photoelectrochemical cell and semiconductor photoelectrochemical cell
- Patent Title (中): 半导体光电化学电池和半导体光电化学电池的制造方法
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Application No.: US11463551Application Date: 2006-08-09
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Publication No.: US07927914B2Publication Date: 2011-04-19
- Inventor: Yoshinori Nakagawa , Kiyohisa Wada
- Applicant: Yoshinori Nakagawa , Kiyohisa Wada
- Applicant Address: JP Osaka
- Assignee: Shiken Co., Ltd.
- Current Assignee: Shiken Co., Ltd.
- Current Assignee Address: JP Osaka
- Agency: Knobbe, Martens, Olson & Bear, LLP
- Priority: JP2005-231668 20050810
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
The invention provides a manufacturing method for a semiconductor photoelectrochemical cell, comprising the steps of burning a base made of titanium or a titanium alloy in an atmosphere of 700° C. to 1000° C. at a rate of temperature increase of no lower than 5° C./second so that a titanium oxide layer is formed on the surface, and thus, mixing titanium metal into said titanium oxide layer.
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