Invention Grant
US07928379B2 Phase plate, imaging method, and electron microscope 有权
相板,成像方法和电子显微镜

  • Patent Title: Phase plate, imaging method, and electron microscope
  • Patent Title (中): 相板,成像方法和电子显微镜
  • Application No.: US12224667
    Application Date: 2007-10-26
  • Publication No.: US07928379B2
    Publication Date: 2011-04-19
  • Inventor: Joachim Zach
  • Applicant: Joachim Zach
  • Applicant Address: DE Heidelberg
  • Assignee: CEOS Corrected Electron Optical Systems GmbH
  • Current Assignee: CEOS Corrected Electron Optical Systems GmbH
  • Current Assignee Address: DE Heidelberg
  • Agent Paul Vincent
  • Priority: DE102006055510 20061124
  • International Application: PCT/EP2007/009289 WO 20071026
  • International Announcement: WO2008/061603 WO 20080529
  • Main IPC: H01J37/26
  • IPC: H01J37/26
Phase plate, imaging method, and electron microscope
Abstract:
The invention concerns a phase plate for electron optical imaging, wherein the zero beam (4) is phase-shifted in order to obtain an image with optimum contrast through interference with the diffracted electron beams (5, 5′). The shading of diffracted electron beams (5, 5′) is kept to a minimum and shading that cannot be reconstructed from the obtained image data is prevented. This is achieved in that the electrode (1′) is designed as a shielded conductor (7), which is disposed to extend from a mounting (8) in a substantially radial direction towards the area of the zero beam (4), wherein the shielded conductor (7) has an end (9) in front of the area of the zero beam (4) such that a field (6) is formed between the conductor (7) and the shielding (10) surrounding it, which overlaps this area. The invention also concerns an imaging method for complete reconstruction of the image and an electron microscope (12) which is provided with the phase plate (1).
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