Invention Grant
US07928403B2 Multiple lens assembly and charged particle beam device comprising the same
有权
多透镜组件和包括该多透镜组件的带电粒子束装置
- Patent Title: Multiple lens assembly and charged particle beam device comprising the same
- Patent Title (中): 多透镜组件和包括该多透镜组件的带电粒子束装置
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Application No.: US11323017Application Date: 2005-12-30
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Publication No.: US07928403B2Publication Date: 2011-04-19
- Inventor: Pavel Adamec
- Applicant: Pavel Adamec
- Applicant Address: DE Heimstetten
- Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Current Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Current Assignee Address: DE Heimstetten
- Agency: Patterson & Sheridan, LLP
- Priority: EP04031042 20041230
- Main IPC: H01J37/26
- IPC: H01J37/26
Abstract:
The invention provides a multiple-lens assembly 1 for a charged particle beam device which comprises at least two lens sub units 2, each sub unit having an optical axis 3, wherein at least two of the optical axes of the lens sub units are inclined to each other. Further, the invention provides a charged particle beam device which comprises at least one multiple-lens assembly and a method for operating a charged particle beam device.
Public/Granted literature
- US20060151713A1 Multiple lens assembly and charged particle beam device comprising the same Public/Granted day:2006-07-13
Information query
