Invention Grant
- Patent Title: Magnetic lens assembly
- Patent Title (中): 磁性透镜组件
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Application No.: US12181199Application Date: 2008-07-28
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Publication No.: US07928405B2Publication Date: 2011-04-19
- Inventor: Pavel Adamec , Carlo Salvesen , Ivo Liska
- Applicant: Pavel Adamec , Carlo Salvesen , Ivo Liska
- Applicant Address: DE Heimstetten
- Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Current Assignee: ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Current Assignee Address: DE Heimstetten
- Agency: Patterson & Sheridan, L.L.P.
- Priority: EP07014812 20070727
- Main IPC: H01J1/50
- IPC: H01J1/50

Abstract:
A lens assembly having a magnetic lens assembly for a charged particle beam system is provided. The lens assembly includes: a first pole piece having a connecting portion of the first pole piece and a gap portion of the first pole piece, a second pole piece having a connecting portion of the second pole piece and a gap portion of the second pole piece, wherein the first pole piece and the second pole piece provide a gap at the respective gap portions, a coil for exciting the magnetic lens assembly, a centering element comprising a material that has a smaller Young's modulus than the material of the first and the material of the second pole piece, wherein the pole pieces are connected with each other at the respective connecting portions and have a centering element receiving portion towards the respective gap portion ends of the pole pieces.
Public/Granted literature
- US20090039280A1 MAGNETIC LENS ASSEMBLY Public/Granted day:2009-02-12
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