Invention Grant
- Patent Title: Vertical transistor and vertical transistor array
- Patent Title (中): 垂直晶体管和垂直晶体管阵列
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Application No.: US12368278Application Date: 2009-02-09
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Publication No.: US07928490B2Publication Date: 2011-04-19
- Inventor: Jung-Hua Chen
- Applicant: Jung-Hua Chen
- Applicant Address: TW Taoyuan
- Assignee: Nanya Technology Corporation
- Current Assignee: Nanya Technology Corporation
- Current Assignee Address: TW Taoyuan
- Agency: Jianq Chyun IP Office
- Priority: TW97141636A 20081029
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L29/76 ; H01L29/94 ; H01L31/119

Abstract:
A vertical transistor including a substrate, a gate, a base line and a gate dielectric layer is provided. The substrate includes a pillar protruding out of a surface of the substrate. The pillar includes a first doped region, a channel region and a second doped region from bottom to top. The gate is disposed on a sidewall at one side of the channel region. The base line is disposed on a sidewall at the other side of the channel region and not contacted with the gate. The gate dielectric layer is disposed between the gate and the channel region.
Public/Granted literature
- US20100102361A1 VERTICAL TRANSISTOR AND FABRICATING METHOD THEREOF AND VERTICAL TRANSISTOR ARRAY Public/Granted day:2010-04-29
Information query
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