Invention Grant
- Patent Title: Semiconductor memory device and method for manufacturing the same
- Patent Title (中): 半导体存储器件及其制造方法
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Application No.: US12494243Application Date: 2009-06-29
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Publication No.: US07928504B2Publication Date: 2011-04-19
- Inventor: Woong Choi
- Applicant: Woong Choi
- Applicant Address: KR Icheon
- Assignee: Hynix Semiconductor Inc.
- Current Assignee: Hynix Semiconductor Inc.
- Current Assignee Address: KR Icheon
- Priority: KR10-2009-0036063 20090424
- Main IPC: H01L29/788
- IPC: H01L29/788 ; H01L29/76 ; H01L21/336 ; H01L21/3205

Abstract:
A semiconductor memory device and a method for manufacturing the same are disclosed, which reduce parasitic capacitance generated between a storage node contact and a bit line of a high-integration semiconductor device. A method for manufacturing a semiconductor memory device includes forming a buried word line in an active region of a cell region, forming an insulation layer in the cell region and a lower electrode layer of a gate in a peripheral region so that a height of the insulation layer is substantially equal to that of the lower electrode layer, and providing a first conductive layer over the cell region and the peripheral region to form a bit line layer and an upper electrode layer.
Public/Granted literature
- US20100270602A1 SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2010-10-28
Information query
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