Invention Grant
US07929120B2 Apparatus for controlling optical fringe generation member based on detected optical fringe and method therefor
有权
用于基于检测到的光学边缘控制光学边缘产生部件的装置及其方法
- Patent Title: Apparatus for controlling optical fringe generation member based on detected optical fringe and method therefor
- Patent Title (中): 用于基于检测到的光学边缘控制光学边缘产生部件的装置及其方法
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Application No.: US12030106Application Date: 2008-02-12
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Publication No.: US07929120B2Publication Date: 2011-04-19
- Inventor: Tsutomu Osaka
- Applicant: Tsutomu Osaka
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon USA Inc IP Division
- Priority: JP2007-033496 20070214
- Main IPC: G01L1/24
- IPC: G01L1/24 ; G01B11/02
Abstract:
An optical fringe generation member control apparatus is provided. The control apparatus includes a detection unit that is configured to detect an optical fringe. Further, the control apparatus includes a control unit that is configured to control operation of a member on which the optical fringe is generated. The control unit controls the operation based on a detection result by the detection unit.
Public/Granted literature
- US20080291423A1 OPTICAL FRINGE GENERATION MEMBER CONTROL APPARATUS AND METHOD THEREFOR Public/Granted day:2008-11-27
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