Invention Grant
- Patent Title: Method of fabricating a micromechanical structure out of two-dimensional elements and micromechanical device
- Patent Title (中): 从二维元件和微机械器件制造微机械结构的方法
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Application No.: US12058812Application Date: 2008-03-31
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Publication No.: US07929192B2Publication Date: 2011-04-19
- Inventor: Thilo Sandner
- Applicant: Thilo Sandner
- Applicant Address: DE Munich
- Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Current Assignee: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Current Assignee Address: DE Munich
- Agency: Keating & Bennett, LLP
- Priority: DE102007015722 20070402; DE102008012826 20080306
- Main IPC: G02B26/08
- IPC: G02B26/08
Abstract:
In a method of fabricating a micromechanical structure, first, a deflectably supported two-dimensional structure is formed in a substrate and, then, is arranged in a package such that an integrated micromanipulator is arranged between the package and the two-dimensional structure so as to effect a deflection of the two-dimensional structure out of a plane of the substrate.
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