Invention Grant
- Patent Title: System and method for depositing a material on a substrate
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Application No.: US11380095Application Date: 2006-04-25
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Publication No.: US07931937B2Publication Date: 2011-04-26
- Inventor: Ricky Charles Powell , Andrew Kelly Gray , Todd Alden Coleman
- Applicant: Ricky Charles Powell , Andrew Kelly Gray , Todd Alden Coleman
- Applicant Address: US OH Perrysburg
- Assignee: First Solar, Inc.
- Current Assignee: First Solar, Inc.
- Current Assignee Address: US OH Perrysburg
- Agency: Dickstein Shapiro LLP
- Main IPC: C23C16/00
- IPC: C23C16/00 ; H01L21/20

Abstract:
A method and apparatus for depositing a film on a substrate includes introducing a material and a carrier gas into a heated chamber. The material may be a semiconductor material, such as a cadmium chalcogenide. A resulting mixture of vapor and carrier gas containing no unvaporized material is provided. The mixture of vapor and carrier gas are remixed to achieve a uniform vapor/carrier gas composition, which is directed toward a surface of a substrate, such as a glass substrate, where the vapor is deposited as a uniform film.
Public/Granted literature
- US20060236940A1 SYSTEM AND METHOD FOR DEPOSITING A MATERIAL ON A SUBSTRATE Public/Granted day:2006-10-26
Information query
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