Invention Grant
- Patent Title: Method of producing photodiode and the photodiode
- Patent Title (中): 制造光电二极管和光电二极管的方法
-
Application No.: US12292165Application Date: 2008-11-13
-
Publication No.: US07932115B2Publication Date: 2011-04-26
- Inventor: Noriyuki Miura
- Applicant: Noriyuki Miura
- Applicant Address: JP Tokyo
- Assignee: Oki Semiconductor Co., Ltd.
- Current Assignee: Oki Semiconductor Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Kubotera & Associates LLC
- Priority: JP2007-311080 20071130
- Main IPC: H01L31/0352
- IPC: H01L31/0352

Abstract:
A photodiode includes a photosensitive element formed in a silicon semiconductor layer on an insulation layer. The photosensitive element includes a low concentration diffusion layer, a P-type high concentration diffusion layer, and an N-type high concentration diffusion layer. A method of producing the photodiode includes the steps of: forming an insulation material layer on the silicon semiconductor layer after the P-type impurity and the N-type impurity are implanted into the low concentration diffusion layer, the P-type high concentration diffusion layer, and the N-type high concentration diffusion layer; forming an opening portion in the insulation material layer in an area for forming the low concentration diffusion layer; and etching the silicon semiconductor layer in the area for forming the low concentration diffusion layer so that a thickness of the silicon semiconductor layer is reduced to a specific level.
Public/Granted literature
- US20090140368A1 Method of producing photodiode and the photodiode Public/Granted day:2009-06-04
Information query
IPC分类: