Invention Grant
US07932154B2 Method of fabricating non-volatile flash memory device having at least two different channel concentrations
失效
制造具有至少两个不同通道浓度的非易失性闪速存储器件的方法
- Patent Title: Method of fabricating non-volatile flash memory device having at least two different channel concentrations
- Patent Title (中): 制造具有至少两个不同通道浓度的非易失性闪速存储器件的方法
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Application No.: US12007097Application Date: 2008-01-07
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Publication No.: US07932154B2Publication Date: 2011-04-26
- Inventor: Sang-Su Kim , Sung-Taeg Kang , In-Wook Cho , Jeong-Hwan Yang
- Applicant: Sang-Su Kim , Sung-Taeg Kang , In-Wook Cho , Jeong-Hwan Yang
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Lee & Morse P.C.
- Priority: KR2004-45142 20040617
- Main IPC: H01L21/334
- IPC: H01L21/334

Abstract:
In a non-volatile flash memory device, and a method of fabricating the same, the device includes a semiconductor substrate, a source region and a drain region disposed in the semiconductor substrate to be spaced apart from each other, a tunneling layer pattern, a charge trap layer pattern and a shielding layer pattern, which are sequentially stacked on the semiconductor substrate between the source region and the drain region, adjacent to the source region, a first channel region disposed in the semiconductor substrate below the tunneling layer pattern, a gate insulating layer disposed on the semiconductor substrate between the drain region and the first channel region, a second channel region disposed in the semiconductor substrate below the gate insulating layer, a concentration of the second channel region being different from that of the first channel region, and a gate electrode covering the shielding layer pattern and the gate insulating layer.
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