Invention Grant
- Patent Title: Structure and method for performance improvement in vertical bipolar transistors
- Patent Title (中): 垂直双极晶体管性能改进的结构和方法
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Application No.: US11760288Application Date: 2007-06-08
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Publication No.: US07932155B2Publication Date: 2011-04-26
- Inventor: James S. Dunn , David L. Harame , Jeffrey B. Johnson , Alvin J. Joseph
- Applicant: James S. Dunn , David L. Harame , Jeffrey B. Johnson , Alvin J. Joseph
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Roberts Mlotkowski Safran & Cole, P.C.
- Agent Anthony Canale
- Main IPC: H01L21/8222
- IPC: H01L21/8222

Abstract:
A method of forming a semiconductor device having two different strains therein is provided. The method includes forming a strain in a first region with a first straining film, and forming a second strain in a second region with a second straining film. Either of the first or second strains may be either tensile or compressive. Additionally the strains may be formed at right angles to one another and may be additionally formed in the same region. In particular a vertical tensile strain may be formed in a base and collector region of an NPN bipolar transistor and a horizontal compressive strain may be formed in the extrinsic base region of the NPN bipolar transistor. A PNP bipolar transistor may be formed with a compression strain in the base and collector region in the vertical direction and a tensile strain in the extrinsic base region in the horizontal direction.
Public/Granted literature
- US20080014705A1 STRUCTURE AND METHOD FOR PERFORMANCE IMPROVEMENT IN VERTICAL BIPOLAR TRANSISTORS Public/Granted day:2008-01-17
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