Invention Grant
- Patent Title: Phase change memory cell with vertical transistor
- Patent Title (中): 具有垂直晶体管的相变存储单元
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Application No.: US11771457Application Date: 2007-06-29
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Publication No.: US07932167B2Publication Date: 2011-04-26
- Inventor: Toshiharu Furukawa , John G. Gaudiello , Mark Charles Hakey , Steven J. Holmes , David V. Horak , Charles William Koburger, III , Chung Hon Lam
- Applicant: Toshiharu Furukawa , John G. Gaudiello , Mark Charles Hakey , Steven J. Holmes , David V. Horak , Charles William Koburger, III , Chung Hon Lam
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Ryan, Mason & Lewis, LLP
- Agent Alexanian Vazken
- Main IPC: H01L21/44
- IPC: H01L21/44

Abstract:
A memory cell in an integrated circuit is fabricated in part by forming a lower electrode feature, an island, a sacrificial feature, a gate feature, and a phase change feature. The island is formed on the lower electrode feature and has one or more sidewalls. It comprises a lower doped feature, a middle doped feature formed above the lower doped feature, and an upper doped feature formed above the middle doped feature. The sacrificial feature is formed above the island, while the gate feature is formed along each sidewall of the island. The gate feature overlies at least a portion of the middle doped feature of the island and is operative to control an electrical resistance therein. Finally, the phase feature is formed above the island at least in part by replacing at least a portion of the sacrificial feature with a phase change material. The phase change material is operative to switch between lower and higher electrical resistance states in response to an application of an electrical signal.
Public/Granted literature
- US20090001337A1 Phase Change Memory Cell with Vertical Transistor Public/Granted day:2009-01-01
Information query
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