Invention Grant
- Patent Title: Y2O3 sintered body and corrosion resistant member for semiconductor/liquid crystal producing apparatus
- Patent Title (中): Y2O3烧结体和半导体/液晶制造装置的耐腐蚀构件
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Application No.: US10566332Application Date: 2004-06-30
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Publication No.: US07932202B2Publication Date: 2011-04-26
- Inventor: Toshiyuki Hamada
- Applicant: Toshiyuki Hamada
- Applicant Address: JP Kyoto
- Assignee: Kyocera Corporation
- Current Assignee: Kyocera Corporation
- Current Assignee Address: JP Kyoto
- Agency: DLA Piper LLP (US)
- Priority: JP2003-203187 20030729; JP2003-333902 20030925
- International Application: PCT/JP2004/009621 WO 20040630
- International Announcement: WO2005/009919 WO 20050203
- Main IPC: C04B35/505
- IPC: C04B35/505
Abstract:
A corrosion resistant member made of the Y2O3 sintered material that contains 99.9% by weight or more Y in terms of Y2O3, and has a difference in mean crystal grain size between the surface and the inside region of the Y2O3 sintered material not larger than 30 μm.
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