Invention Grant
- Patent Title: Implantation before epitaxial growth for photonic integrated circuits
- Patent Title (中): 光子集成电路外延生长之前的植入
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Application No.: US11528797Application Date: 2006-09-27
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Publication No.: US07932512B1Publication Date: 2011-04-26
- Inventor: Yakov I. Royter , Rajesh D. Rajavel , Stanislav I. Ionov
- Applicant: Yakov I. Royter , Rajesh D. Rajavel , Stanislav I. Ionov , Irina Ionova, legal representative , Sophi Ionova, legal representative
- Applicant Address: US CA Malibu
- Assignee: HRL Laboratories, LLC
- Current Assignee: HRL Laboratories, LLC
- Current Assignee Address: US CA Malibu
- Agency: Christie, Parker, Hale
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L31/00

Abstract:
Fabrication of a photonic integrated circuit (PIC) including active elements such as a semiconductor optical amplifier (SOA) and passive elements such as a floating rib waveguide. Selective area doping through ion implantation or thermal diffusion before semiconductor epitaxial growth is used in order to define the contact and lateral current transport layers for each active device, while leaving areas corresponding to the passive devices undoped. InP wafers are used as the substrate which may be selectively doped with silicon.
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