Invention Grant
- Patent Title: Nonvolatile ferroelectric memory device using silicon substrate, method for manufacturing the same, and refresh method thereof
- Patent Title (中): 使用硅衬底的非易失性铁电存储器件及其制造方法及其刷新方法
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Application No.: US11715880Application Date: 2007-03-09
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Publication No.: US07932547B2Publication Date: 2011-04-26
- Inventor: Hee Bok Kang
- Applicant: Hee Bok Kang
- Applicant Address: KR Gyeonggi-do
- Assignee: Hynix Semiconductor Inc.
- Current Assignee: Hynix Semiconductor Inc.
- Current Assignee Address: KR Gyeonggi-do
- Agency: IP & T Group LLP
- Priority: KR10-2006-0070963 20060727; KR10-2006-0132602 20061222
- Main IPC: H01L21/02
- IPC: H01L21/02

Abstract:
A nonvolatile ferroelectric memory device using a silicon substrate includes an insulating layer formed in an etching region of the silicon substrate, a bottom word line formed in the insulating layer so as to be enclosed by the insulating layer, a floating channel layer formed over the bottom word line, an impurity layer formed at both ends of the floating channel layer and including a source region formed over the insulating layer and a drain region formed over the silicon substrate, a ferroelectric layer formed over the floating channel layer, and a word line formed over the ferroelectric layer.
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