Invention Grant
US07932547B2 Nonvolatile ferroelectric memory device using silicon substrate, method for manufacturing the same, and refresh method thereof 有权
使用硅衬底的非易失性铁电存储器件及其制造方法及其刷新方法

  • Patent Title: Nonvolatile ferroelectric memory device using silicon substrate, method for manufacturing the same, and refresh method thereof
  • Patent Title (中): 使用硅衬底的非易失性铁电存储器件及其制造方法及其刷新方法
  • Application No.: US11715880
    Application Date: 2007-03-09
  • Publication No.: US07932547B2
    Publication Date: 2011-04-26
  • Inventor: Hee Bok Kang
  • Applicant: Hee Bok Kang
  • Applicant Address: KR Gyeonggi-do
  • Assignee: Hynix Semiconductor Inc.
  • Current Assignee: Hynix Semiconductor Inc.
  • Current Assignee Address: KR Gyeonggi-do
  • Agency: IP & T Group LLP
  • Priority: KR10-2006-0070963 20060727; KR10-2006-0132602 20061222
  • Main IPC: H01L21/02
  • IPC: H01L21/02
Nonvolatile ferroelectric memory device using silicon substrate, method for manufacturing the same, and refresh method thereof
Abstract:
A nonvolatile ferroelectric memory device using a silicon substrate includes an insulating layer formed in an etching region of the silicon substrate, a bottom word line formed in the insulating layer so as to be enclosed by the insulating layer, a floating channel layer formed over the bottom word line, an impurity layer formed at both ends of the floating channel layer and including a source region formed over the insulating layer and a drain region formed over the silicon substrate, a ferroelectric layer formed over the floating channel layer, and a word line formed over the ferroelectric layer.
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