Invention Grant
US07932548B2 Systems and methods for fabricating self-aligned memory cell 失效
用于制造自对准存储单元的系统和方法

Systems and methods for fabricating self-aligned memory cell
Abstract:
Systems and methods are disclosed to form a resistive random access memory (RRAM) by forming a first metal electrode layer; depositing an insulator above the metal electrode layer and etching the insulator to expose one or more metal portions; depositing a Pr1-XCaXMnO3 (PCMO) layer above the insulator and the metal portions, wherein X is between approximately 0.3 and approximately 0.5, to form one or more self-aligned RRAM cells above the first metal electrode; and depositing a second metal electrode layer above the PCMO layer.
Public/Granted literature
Information query
Patent Agency Ranking
0/0