Invention Grant
- Patent Title: Systems and methods for fabricating self-aligned memory cell
- Patent Title (中): 用于制造自对准存储单元的系统和方法
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Application No.: US11486472Application Date: 2006-07-14
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Publication No.: US07932548B2Publication Date: 2011-04-26
- Inventor: Makoto Nagashima
- Applicant: Makoto Nagashima
- Applicant Address: AU Perth
- Assignee: 4D-S Pty Ltd.
- Current Assignee: 4D-S Pty Ltd.
- Current Assignee Address: AU Perth
- Agency: Sawyer Law Group, P.C.
- Main IPC: H01L29/76
- IPC: H01L29/76

Abstract:
Systems and methods are disclosed to form a resistive random access memory (RRAM) by forming a first metal electrode layer; depositing an insulator above the metal electrode layer and etching the insulator to expose one or more metal portions; depositing a Pr1-XCaXMnO3 (PCMO) layer above the insulator and the metal portions, wherein X is between approximately 0.3 and approximately 0.5, to form one or more self-aligned RRAM cells above the first metal electrode; and depositing a second metal electrode layer above the PCMO layer.
Public/Granted literature
- US20080014750A1 Systems and methods for fabricating self-aligned memory cell Public/Granted day:2008-01-17
Information query
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